en گروه سرامیک Ceramic Materials and Engineering Research Paper Research Paper <span lang="EN-GB" style="font-size:12.0pt"><span style="line-height:107%"><span calibri="" style="font-family:">In this study, RF magnetron sputtering was employed to create titanium dioxide (TiO₂) thin films doped with zirconium oxide (ZrO₂) (TZO) onto quartz and silicon substrates at 100^oC for the purpose of evaluating the effect of ZrO₂ doping on the microstructural, electrical, optical and gas sensing properties of the TiO₂ films. Different doping concentrations (0.0, 2.0 and 4.0 wt.%) were used to compare performances of the films with a thickness ranging between 147 nm to 178 nm. Structural and surface morphology characterizations of the prepared films were carried out by X-ray diffraction (XRD) and atomic force microscopy (AFM) techniques. The surface morphology of the prepared TZO films showed a gradual reduction in the grain size while the doping concentration increased. The optical characteristics of the films also exhibited an increasing trend in the optical band gap with the rising ZrO₂ concentration. TiO₂ films showed an n-type conductivity as confirmed by Hall&#39;s measurement. The results of the gas sensing experiments revealed that the sensitivity of the TZO films for the detection of ethanol vapor increased with an increase in the concentration of ZrO₂ dopant. Therefore, TZO film with 4.0 wt.% of ZrO₂ could be used as an effective sensor for detecting ethanol vapor.</span></span></span> ,Zirconium oxide,Titanium dioxide,RF sputtering,Thin film,Sensitivity 99 108 http://ijmse.iust.ac.ir/browse.php?a_code=A-10-5729-1&slc_lang=en&sid=1 Zainab T Hussain zainabturky.h@gmail.com 1800319475328460022047 1800319475328460022047 No Ministry of Higher Education and Scientific Research / Scientific Research Commission Wasna’a M Abdulridha wasnaa.albaghdadi@uokufa.edu.iq 1800319475328460022048 1800319475328460022048 No Ministry of Higher Education and Scientific Research / Scientific Research Commission Murooj A Abood morooj_a@yahoo.com 1800319475328460022049 1800319475328460022049 No Ministry of Higher Education and Scientific Research / Scientific Research Commission farqad saeed farqad.rasheed@gmail.com 1800319475328460022050 1800319475328460022050 Yes Ministry of Higher Education and Scientific Research / Scientific Research Commission